Levitation Micro-Systems: Applications to Sensors and Actuators
- Length: 174 pages
- Edition: 1
- Language: English
- Publisher: Springer
- Publication Date: 2020-12-28
- ISBN-10: 3030589072
- ISBN-13: 9783030589073
- Sales Rank: #0 (See Top 100 Books)
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
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